Modeling MOSFET surface capacitance behavior under non-equilibrium

被引:2
作者
Kapoor, A [1 ]
Jindal, RP [1 ]
机构
[1] Univ Louisiana, William Hansen Hall Dept Elect & Comp Engn, Lafayette, LA 70504 USA
关键词
capacitance modeling; MOSFET; non-equilibrium;
D O I
10.1016/j.sse.2005.03.018
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A normalized analytical solution for the capacitance associated with a MOSFET surface under non-equilibrium conditions is presented. It is shown that this model can be mapped into an equivalent equilibrium problem with 98% accuracy for near intrinsic samples (U-B congruent to 2). The precision becomes even better for highly doped semiconductors. The physics behind this transformation is explained and nomograms generated to present data in a highly normalized form. (c) 2005 Elsevier Ltd. All rights reserved.
引用
收藏
页码:976 / 980
页数:5
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