ANALYTICAL MODELING OF SQUEEZE FILM DAMPING IN DUAL AXIS TORSION MICROACTUATORS

被引:7
作者
Moeenfard, Hamid [1 ]
机构
[1] Ferdowsi Univ Mashhad, Khorasan Razavi, Iran
关键词
Dual axis torsion microactuator; squeeze film damping; Reynolds equation; analytical modeling; damping torque; MICROMIRRORS; GAS; MIRROR;
D O I
10.1142/S0218625X15500067
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this paper, problem of squeeze film damping in dual axis torsion microactuators is modeled and closed form expressions are provided for damping torques around tilting axes of the actuator. The Reynolds equation which governs the pressure distribution underneath the actuator is linearized. The resulting equation is then solved analytically. The obtained pressure distribution is used to calculate the normalized damping torques around tilting axes of the actuator. Dependence of the damping torques on the design parameters of the dual axis torsion actuator is studied. It is observed that with proper selection of the actuator's aspect ratio, damping torque along one of the tilting directions can be eliminated. It is shown that when the tilting angles of the actuator are small, squeeze film damping would act like a linear viscous damping. The results of this paper can be used for accurate dynamical modeling and control of torsion dual axis microactuators.
引用
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页数:8
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