Design and FEM analysis of a new and simple electro-thermal actuated microgripper

被引：1
|
作者：
Vargas-Chable, P. [1 ]
Tecpoyotl-Torres, M. [2 ]
Cabello-Ruiz, R. [1 ]
机构：
[1] UAEM, CIICAp, IICBA, Ingn & Ciencias Aplicadas, Av Univ 1001, Cuernavaca 62209, Morelos, Mexico
[2] UAEM, CIICAp, IICBA, Ctr Invest Ingn & Ciencias Aplicadas, Av Univ 1001, Cuernavaca 62209, Morelos, Mexico
来源：
2017 INTERNATIONAL CONFERENCE ON MECHATRONICS, ELECTRONICS AND AUTOMOTIVE ENGINEERING (ICMEAE) | 2017年
关键词：
MEMS; modeling; cantilever; validation; deformation; Ansys; microactuators; microgripper; MEMS; VOLTAGE;
D O I：
10.1109/ICMEAE.2017.27
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, the dynamic and electric analysis of a novel electrostatically actuated microdevice is presented. This device consist of an arrangement of four parallel microcantilevers, which is fed with 1 V. The analysis was carried out by Finite Element Method (FEM) in Ansys Workbench in order to obtain: current intensity, temperature distribution, Joule effect, structural deformation, natural frequency, and reaction force, which characterize the microgripper performance. The material used in the analysis was Silicon. A thermoelastic model, that describes the behavior mechanical of the device, is developed. The device had an initial gap of 28 mu m and a final gap of similar to 4 mu m, the force of subjection in grippers is 0.4 mu N.
引用
收藏
页码：145 / 150
页数：6
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