The Nanostructured Origami™ 3D fabrication and assembly process for nanopatterned 3D structures

被引：2
|
作者：
In, HJ [1 ]
Arora, WJ [1 ]
Stellman, P [1 ]
Kumar, S [1 ]
Shao-Horn, Y [1 ]
Smith, HI [1 ]
Barbastathis, G [1 ]
机构：
[1] MIT, Dept Mech Engn, Cambridge, MA 02139 USA
来源：
SMART STRUCTURES AND MATERIALS 2005: SMART ELECTRONICS, MEMS, BIOMEMS, AND NANOTECHNOLOGY | 2005年 / 5763卷
关键词：
three-dimensional (3D) fabrication; rnicroassembly; nanostructured origami; nanotechnology;
D O I：
10.1117/12.600304
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Nanostructured Origami (TM) 3D Fabrication and Assembly Process is a method of manufacturing 3D nanostructured devices using exclusively 2D micro- and nanofabrication techniques. The origami approach consists of first patterning a large 2D membrane and then folding the membrane along predefined regions to obtain the final 3D configuration. We report on the materials, actuation, and modeling aspects of building an origami structure. Experimental results from fabricated devices as well as future applications of the technique are also presented.
引用
收藏
页码：84 / 95
页数：12
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