SiGe nanowire arrays based thermoelectric microgenerator

被引：69

作者：

Noyan, Inci Donmez ^{[1
]}

Gadea, Gerard ^{[2
]}

Salleras, Marc ^{[1
]}

Pacios, Merce ^{[2
]}

Calaza, Carlos ^{[1
]}

Stranz, Andrej ^{[1
]}

Dolcet, Marc ^{[1
]}

Morata, Alex ^{[2
]}

Tarancon, Albert ^{[2
,3
]}

Fonseca, Luis ^{[1
]}

机构：

[1] CSIC, CNM, IMB, Campus UAB, Barcelona 08193, Spain

[2] Catalonia Inst Energy Res IREC, Dept Adv Mat Energy Applicat, C Jardi Dones Negre 1,Planta 2, Barcelona 08930, Spain

[3] ICREA, Passeig Lluis Co 23, Barcelona 08010, Spain

来源：

NANO ENERGY | 2019年 / 57卷

关键词：

SiGe nanowires; Thermoelectric micro/nanogenerator; MEMS; Energy harvesting; VLS-CVD; SEMICONDUCTOR NANOWIRES; THERMAL TRANSPORT; PHONON-DRAG; GENERATORS;

D O I：

10.1016/j.nanoen.2018.12.050

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Thermoelectric micro/nanogenerators (mu TEGs) are potential candidates as energy harvesters to power IoT sensors. This study reports on a thermoelectric micro/nanogenerator with a planar architecture built by silicon micromachining technologies that uses silicon-germanium (SiGe) nanowire (NW) arrays as thermoelectric material. The growth of bottom-up NW arrays by means of Chemical Vapour Deposition - Vapour Liquid Solid growth (CVD-VLS) and their monolithic integration into prefabricated microplatforms are presented. It is shown that SiGe NWs based mu TEGs can harvest 7.1 mu W/cm(2) without any additional heat exchanger, when there is a waste heat source available at a temperature of 200 degrees C. Since the required power density for many sensing applications is in the range of 10-100 mu W/cm(2) the results obtained in this work are close to meet expectations.

引用

页码：492 / 499

页数：8

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Donmez Noyan I., 2018, THESIS

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