A new linear piezoelectric motor with self-lock feature

被引：8

作者：

Ann, NK ^{[1
]}

Lin, W ^{[1
]}

Ng, LE ^{[1
]}

机构：

[1] Nanyang Technol Univ, Precis Engn & Nanotechnol Ctr, Sch Mech & Prod Engn, Singapore 639798, Singapore

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 2000年 / 39卷 / 12B期

关键词：

piezoelectric; linear motor; self-lock; nanometer; precision positioning;

D O I：

10.1143/JJAP.39.L1311

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The friction-type motor is the overwhelming type in the field of piezoelectric motors. The limitations of the friction-type motors are their inability to achieve high output push force or torque. Based on the theory of self-lock, a novel mechanism for the lineal piezoelectric motor is proposed in this paper. The new motor transfers the output force and displacement generated by a piezoelectric actuator directly, whereas the friction-type motor transfers via the induced friction between the stator and the rotor. The new motor can be applied in cases where both high positioning precision and heavy load are essential. A long-distance positioning accuracy of 10 nm has been achieved.

引用

页码：L1311 / L1313

页数：3