Multiphoton fabrication

被引：511

作者：

LaFratta, Christopher N.

Fourkas, John T. ^{[1
]}

Baldacchini, Tommaso

Farrer, Richard A.

机构：

[1] Univ Maryland, Dept Chem & Biochem, College Pk, MD 20742 USA

[2] Newport Corp, Technol & Applicat Ctr, Irvine, CA 92606 USA

[3] Colorado State Univ, Dept Chem, Pueblo, CO 81001 USA

来源：

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION | 2007年 / 46卷 / 33期

关键词：

lithography; microfabrication; nanostructures; nonlinear optics; polymerization;

D O I：

10.1002/anie.200603995

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Chemical and physical processes driven by multiphoton absorption make possible the fabrication of complex, 3D structures with feature sizes as small as 100 nm. Since its inception less than a decade ago, the field of multiphoton fabrication has progressed rapidly, and multiphoton techniques are now being used to create functional microdevices. In this Review we discuss the techniques and materials used for multiphoton fabrication, the applications that have been demonstrated, as well as those being pursued. We also consider the outlook for this field, both in the laboratory and in industrial settings. © 2007 Wiley-VCH Verlag GmbH & Co. KGaA.

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收藏

页码：6238 / 6258

页数：21

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