Flexible, non-contact and high-precision measurements of optical components

被引：15
作者：
Beutler, A. [1 ]
机构：
[1] Mahr GmbH, Carl Mahr Str 1, D-37073 Gottingen, Germany
来源：
SURFACE TOPOGRAPHY-METROLOGY AND PROPERTIES | 2016年 / 4卷 / 02期
关键词：
metrology; non-contact; optical; profilometer; topography; coordinate measuring instrument; asphere;
D O I：
10.1088/2051-672X/4/2/024011
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
A high-accuracy cylindrical coordinate measuring instrument developed for the measurement of optical components is presented. It is equipped with an optical point sensor system including a high aperture probe. This setup allows measurements to be performed with high accuracy in a flexible way. Applications include the measurement of the topography of high-precision aspheric and freeform lenses and diffractive structures. High measuring speeds guarantee the implementation in a closed-loop production process.
引用
收藏
页数：13
相关论文
共 14 条
  • [1] [Anonymous], 2015, 7 HIGH LEV EXP M 201
  • [2] [Anonymous], VER ASPH
  • [3] [Anonymous], UA3P 300 4 5 ULTR AC
  • [4] Beutler A, 2015, 5 ASPE TOP M PREC IN, P101
  • [5] Beutler A, 2014, ASPE ASPEN SUMM TOP, P67
  • [6] Beutler A, 2009, P SOC PHOTO-OPT INS, V7389
  • [7] Beutler A, 2014, CLASSICAL OPTICS 201
  • [8] Deflectometry challenges interferometry - the competition gets tougher!
    Faber, Christian
    Olesch, Evelyn
    Krobot, Roman
    Haeusler, Gerd
    [J]. INTERFEROMETRY XVI: TECHNIQUES AND ANALYSIS, 2012, 8493
  • [9] Henselmans R, 2009, P SOC PHOTO-OPT INS, V7426
  • [10] Henselmans R., 2009, THESIS EINDHOVEN U T
12