Microsystem Technologies: foreword to special issue on design, test, integration and packaging of MEMS/MOEMS, 2010

被引：0

作者：

Courtois, Bernard ^{[1
]}

Michel, Bernd ^{[1
]}

机构：

[1] Microsyst Technol, Grenoble, France

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2011年 / 17卷 / 04期

关键词：

D O I：

10.1007/s00542-011-1296-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：481 / 481

页数：1

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