Surface insulating properties of titanium implanted alumina ceramics by plasma immersion ion implantation

被引：8
作者：
Zhu, Mingdong [1 ,2 ]
Song, Falun [2 ]
Li, Fei [2 ]
Jin, Xiao [2 ]
Wang, Xiaofeng [1 ]
Wang, Langping [1 ]
机构：
[1] Harbin Inst Technol, State Key Lab Adv Welding & Joining, Harbin 150001, Heilongjiang, Peoples R China
[2] CAEP, Inst Appl Elect, Sci & Technol High Power Microwave Lab, Mianyang 621900, Peoples R China
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2017年 / 407卷
关键词：
Alumina ceramics; Plasma immersion ion implantation; Surface resistivity; Surface flashover; ELECTRICAL-CONDUCTIVITY; WITHSTAND VOLTAGE; FLASHOVER; VACUUM;
D O I：
10.1016/j.nimb.2017.06.005
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The insulating property of the alumina ceramic in vacuum under high voltage is mainly limited by its surface properties. Plasma immersion ion implantation (PIII) is an effective method to modify the surface chemical and physical properties of the alumina ceramic. In order to improve the surface flashover voltage of the alumina ceramic in vacuum, titanium ions with an energy of about 20 keV were implanted into the surface of the alumina ceramic using the PIII method. The surface properties of the as-implanted samples, such as the chemical states of the titanium, morphology and surface resistivity, were characterized by X-ray photoelectron spectroscopy, scanning electron microscope and electrometer, respectively. The surface flashover voltages of the as-implanted alumina samples were measured by a vacuum surface flashover experimental system. The XPS spectra revealed that a compound of Ti, TiO2 and Al2O3 was formed in the inner surface of the alumina sample. The electrometer results showed that the surface resistivity of the implanted alumina decreased with increased implantation time. In addition, after the titanium ion implantation, the maximum hold-off voltage of alumina was increased to 38.4 kV, which was 21.5% higher than that of the unimplanted alumina ceramic. (C) 2017 Elsevier B.V. All rights reserved.
引用
收藏
页码：155 / 159
页数：5
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