Oxygen detection using nanostructured TiO2 thin films obtained by the molecular layering method

被引：33

作者：

Mokrushin, Artem S. ^{[1
]}

Simonenko, Elizaveta P. ^{[1
]}

Simonenko, Nikolay P. ^{[1
]}

Akkuleva, Karma T. ^{[2
]}

Antipov, Vladymir V. ^{[2
]}

Zaharova, Natalia, V ^{[2
]}

Malygin, Anatolii A. ^{[2
]}

Bukunov, Kirill A. ^{[3
,4
]}

Sevastyanov, Vladimir G. ^{[1
]}

Kuznetsov, Nikolay T. ^{[1
]}

机构：

[1] Russian Acad Sci, Kurnakov Inst Gen & Inorgan Chem, 31 Leninsky Pr, Moscow 119991, Russia

[2] State Inst Technol St Petersburg Russia, 26 Moskovsky Pr, St Petersburg 190013, Russia

[3] Lomonosov Moscow State Univ, Fac Phys, 1-2 Leninskie Gory, Moscow 119991, Russia

[4] Lomonosov Moscow State Univ, Skobeltsyn Inst Nucl Phys, 1-2 Leninskie Gory, Moscow 119991, Russia

来源：

APPLIED SURFACE SCIENCE | 2019年 / 463卷 / 197-202期

基金：

俄罗斯基础研究基金会;

关键词：

method of the molecular layering (ML); atomic layer deposition (ALD); gas sensor; TiO2; titanium dioxide; humidity; GAS-SENSING MATERIALS; SOL-GEL; SENSORS; DEPOSITION; SENSITIVITY; ANATASE; SURFACE; ZNO;

D O I：

10.1016/j.apsusc.2018.08.208

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Using the molecular layering method (ML), nanostructured TiO2 films have been synthesized that are promising for detecting oxygen over a wide range of concentrations at low operating temperatures of 150-300 degrees C. It has been shown that an anatase thin film is formed; the particle size is 34.9 +/- 3.1 nm. It has been established that it enables the highly responsive detection of oxygen (R-O2/R-Ar up to 26.6 at a temperature of 200 degrees C and O-2 content of 10%). The influence of operating temperature on the response values, and response and recovery time, have been studied. It has been shown that response magnitude slightly depends on humidity, but at 100% humidity response time and signal recovery time increase significantly. A sufficiently high degree of selectivity has been found when detecting oxygen, in comparison with other analyte gases (CO, H-2, CH4 and CO2).

引用

页码：197 / 202

页数：6

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