Synthesis and properties of highly oriented (Sr, Ba)(Nb, Ta)2O6 thin films by chemical solution deposition

被引:21
作者
Sakamoto, W [1 ]
Horie, Y [1 ]
Yogo, T [1 ]
Hirano, S [1 ]
机构
[1] Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2001年 / 40卷 / 9B期
关键词
SBNT; tungsten bronze; thin films; chemical solution deposition method; dielectric properties;
D O I
10.1143/JJAP.40.5599
中图分类号
O59 [应用物理学];
学科分类号
摘要
Transparent and highly oriented (Sr, Ba)(Nb, Ta)(2)O-6 (SBNT) thin films have been synthesized by a chemical solution deposition method. A homogeneous and stable SBNT precursor solution was prepared by controlling the reaction of metal alkoxides in solution and by optimizing the additive as a stabilizing agent. Tantalum-substituted (Sr0.5Ba0.5)Nb2O6 powders and thin films, such as (Sr0.5Ba0.5)(Nb0.5Ta0.5)(2)O-6 (SBNT50/50) and (Sr0.5Ba0.5)(Nb0.8Ta0.2)(2)O-6 (SBNT50/80), directly crystallized into the tetragonal tungsten bronze phase at 700 degreesC. The synthesized SBNT thin films on MgO(100) and Pt(100)/MgO(100) had a prominent c-axis-preferred orientation. Two crystal lattice planes of SBNT were found to inter-row at an orientation of 18.5 degrees on MgO(100) and Pt(100)/MgO(100) substrates by X-ray pole figure measurement. The SBNT50/80 and SBNT50/50 thin films on Pt(100)/MgO(100) were paraelectric at room temperature and showed diffuse phase transition of the epsilon -T curves.
引用
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页码:5599 / 5604
页数:6
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