Laser and electrochemical complex machining of micro-stent with on-machine three-dimensional measurement

被引：14

作者：

Kasashima, Nagayoshi ^{[1
]}

Kurita, Tsuneo ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Ingenious Micromfg Syst Grp, Adv Mfg Res Inst, AIST Tsukuba E, Tsukuba, Ibaraki 3058564, Japan

来源：

OPTICS AND LASERS IN ENGINEERING | 2012年 / 50卷 / 03期

关键词：

Laser cutting; Laser measurement; On machine measurement; Stent; Electrochemical machining;

D O I：

10.1016/j.optlaseng.2011.10.022

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In the micro-fabrication, small installation misalignment and deformation of the workpiece cause fatal damage. On-machine measurement is one of the efficient methods to prevent this damage. Our system performs the laser machining and the three-dimensional measurement of the workpiece position using only one laser. Based on the measurement result, the position error of the workpiece is automatically corrected and laser-machined. Electrochemical machining (ECM) is also done on the same machining system. In this paper, the configuration of the system is explained. Measurement and error correcting techniques are described in detail. And the experimental results that made stent shape using the micro-tube of diameter 120 mu m and 210 mu m are shown. (C) 2011 Elsevier Ltd. All rights reserved.

引用

页码：354 / 358

页数：5

共 5 条

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