Efficient Optical Coupling between III-V Semiconductor and SiNx Waveguides via Heteroepitaxial Integration

被引：2

作者：

Heidelberger, Christopher ^{[1
]}

Sorace-Agaskar, Cheryl ^{[1
]}

Plant, Jason J. ^{[1
]}

Kharas, Dave ^{[1
]}

Swint, Reuel B. ^{[1
]}

Dhingra, Pankul ^{[2
]}

Lee, Minjoo L. ^{[2
]}

Juodawlkis, Paul W. ^{[1
]}

机构：

[1] MIT, Lincoln Lab, Lexington, MA 02420 USA

[2] Univ Illinois, Dept Elect & Comp Engn, 1406 W Green St, Urbana, IL 61801 USA

来源：

2021 ANNUAL CONFERENCE OF THE IEEE PHOTONICS SOCIETY (IPC) | 2021年

关键词：

D O I：

10.1109/IPC48725.2021.9593053

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrate the first reported integration of III-V waveguides (GaAs/Al0.4Ga0.6As) with SiNx waveguides via heteroepitaxial III-V-on-silicon growth. We achieve efficient optical coupling (-2.5 dB loss/transition) at 1550 nm and low threading dislocation density (4 x 10(6) cm(-2)), suitable for fabrication of high-performance optoelectronic devices. (C) 2021 Massachusetts Institute of Technology

引用

页数：2

共 50 条

[31] III-V semiconductor based MOEMS devices for optical Telecommunications
Garrigues, M
Leclercq, JL
Viktorovitch, P
DEVICE AND PROCESS TECHNOLOGIES FOR MEMS AND MICROELECTRONICS II, 2001, 4592 : 64 - 75
[32] Integrating III-V, Si and polymer waveguides for optical interconnects: RAPIDO
Aalto, Timo
Harjanne, Mikko
Offrein, Bert-Jan
Caer, Charles
Neumeyr, Christian
Malacarne, Antonio
Guina, Mircea
Sheehan, Robert Noel
Peters, Frank Hudson
Melanen, Petri
OPTICAL INTERCONNECTS XVI, 2016, 9753
[33] Indirect adatom interactions via III-V semiconductor substrates
Schranz, DW
Davison, SG
INTERNATIONAL JOURNAL OF QUANTUM CHEMISTRY, 1998, 67 (06) : 377 - 397
[34] INVESTIGATION OF EVANESCENT COUPLING BETWEEN SOI WAVEGUIDES AND HETEROGENEOUSLY-INTEGRATED III-V PIN PHOTODETECTORS
Sheng, Zhen
Liu, Liu
Brouckaert, Joost
He, Sailing
Van Thourhout, Dries
Baets, Roel
2009 IEEE 21ST INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE & RELATED MATERIALS (IPRM), 2009, : 159 - +
[35] Synthesis and optical properties of multiband III-V semiconductor alloys
Yu, K. M.
Walukiewicz, W.
Farshchi, R.
Dubon, O. D.
Ager, J. W., III
Sharp, I. D.
Haller, E. E.
PHYSICS OF SEMICONDUCTORS, PTS A AND B, 2007, 893 : 1477 - +
[36] Novel integration method for III-V semiconductor devices on silicon platform
Matsumoto, Keiichi
Kishikawa, Junya
Nishiyama, Tetsuo
Onuki, Yuya
Shimomura, Kazuhiko
JAPANESE JOURNAL OF APPLIED PHYSICS, 2016, 55 (11)
[37] Advances in the Heterogeneous Integration of Silicon and III-V Semiconductor Lasers (Invited)
Xu, Gao
Lin, Chang
LASER & OPTOELECTRONICS PROGRESS, 2024, 61 (19)
[38] III-V semiconductor optical micro-ring resonators
Grover, R
Absil, PP
Ibrahim, TA
Ho, PT
MICRORESONATORS AS BUILDING BLOCKS FOR VLSI PHOTONICS, 2004, 709 : 110 - 129
[39] Enhanced Coupling Strength Gratings for Couplers in III-V Compound Dielectric Waveguides
Evans, Gary A.
Butler, Jerome K.
He, Ruo-Hua
Kirk, Jay B.
Yao, Jin
Zheng, Xuezhe
Krishnamoorthy, Ashok V.
JOURNAL OF LIGHTWAVE TECHNOLOGY, 2017, 35 (11) : 2234 - 2242
[40] Enhanced Coupling Strength Grating Out-Couplers in III-V Waveguides
Evans, Gary A.
Butler, Jerome K.
He, Ruo-Hua
Kirk, Jay B.
Yao, Jin
Zheng, Xuezhe
Krishnamoorthy, Ashok V.
2016 INTERNATIONAL SEMICONDUCTOR LASER CONFERENCE (ISLC), 2016,

← 1 2 3 4 5 →