Obtaining shape from scanning electron microscope using hopfield neural network

被引:5
作者
Iwahori, Y
Kawanaka, H
Fukui, S
Funahashi, K
机构
[1] Chubu Univ, Kasugai, Aichi 4878501, Japan
[2] Nagoya Inst Technol, Showa Ku, Nagoya, Aichi 4668555, Japan
[3] Aichi Univ Educ, Kariya, Aichi 4488542, Japan
关键词
shape recovery; Hopfield neural network; optimization; scanning electron microscope;
D O I
10.1007/s10845-005-4374-y
中图分类号
TP18 [人工智能理论];
学科分类号
081104 ; 0812 ; 0835 ; 1405 ;
摘要
In the environment of the Scanning Electron Microscope (SEM), it is necessary to establish the technology of recovering the 3D shape of a target object from the observed 2D shading image. SEM has the function to rotate the object stand to some extent. This paper uses this principle and proposes a new method to recover the object shape using two shading images taken during the rotation. The proposed method uses the optimization of the energy function using Hopfield neural network, which is based on the standard regularization theory. It is also important to give the initial vector that is close to the true optimal solution vector. Computer simulation evaluates the essential ability of the proposed method. Further, the real experiments for the SEM images are also demonstrated and discussed.
引用
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页码:715 / 725
页数:11
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