A study of electrostatic force nonlinearities in resonant microstructures

被引：46

作者：

Agarwal, Manu ^{[1
]}

Chandorkar, Saurabh A. ^{[1
]}

Mehta, Harsh ^{[1
]}

Candler, Robert N. ^{[2
]}

Kim, Bongsang ^{[1
]}

Hopcroft, Matthew A. ^{[1
]}

Melamud, Renata ^{[1
]}

Jha, Chandra M. ^{[1
]}

Bahl, Gaurav ^{[1
]}

Yama, Gary ^{[2
]}

Kenny, Thomas W. ^{[1
]}

Murmann, Boris ^{[1
]}

机构：

[1] Stanford Univ, Dept Elect & Mech Engn, Stanford, CA 94305 USA

[2] Robert Bosch GmbH, Res & Technol Ctr, Palo Alto, CA 94040 USA

来源：

APPLIED PHYSICS LETTERS | 2008年 / 92卷 / 10期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.2834707

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This letter investigates the nature of amplitude frequency (A-f) dependence caused by nonlinearities in the parallel plate electrostatic transduced in resonant microstructures. We present analytical and experimental evidences that the A-f nonlinearities are practically always dominated by third order nonlinear terms. For an electrostatically unbalanced system, we show that the bias voltage at which second and third order nonlinearities have equal impact on A-f dependence corresponds to similar to 90% of the dc pull-in voltage. (C) 2008 American Institute of Physics.

引用

页数：3