Reducing support loss in micromechanical ring resonators using phononic band-gap structures

被引：36
作者：
Hsu, Feng-Chia [1 ]
Hsu, Jin-Chen [2 ]
Huang, Tsun-Che [1 ]
Wang, Chin-Hung [1 ]
Chang, Pin [1 ]
机构：
[1] Ind Technol Res Inst S, Tainan 709, Taiwan
[2] Natl Yunlin Univ Sci & Technol, Dept Mech Engn, Touliu 64002, Yunlin, Taiwan
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2011年 / 44卷 / 37期
关键词：
ANCHOR LOSS; ABSORPTION; WAVES; SOUND;
D O I：
10.1088/0022-3727/44/37/375101
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In micromechanical resonators, energy loss via supports into the substrates may lead to a low quality factor. To eliminate the support loss, in this paper a phononic band- gap structure is employed. We demonstrate a design of phononic-crystal (PC) strips used to support extensional wine-glass mode ring resonators to increase the quality factor. The PC strips are introduced to stop elastic-wave propagation by the band-gap and deaf-band effects. Analyses of resonant characteristics of the ring resonators and the dispersion relations, eigenmodes, and transmission properties of the PC strips are presented. With the proposed resonator architecture, the finite-element simulations show that the leaky power is effectively reduced and the stored energy inside the resonators is enhanced simultaneously as the operating frequencies of the resonators are within the band gap or deaf bands. Realization of a high quality factor micromechanical ring resonator with minimized support loss is expected.
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页数：10
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共 43 条
  • [21] Support Loss Suppression in Micromechanical Resonators by the use of Phononic Band Gap Structures
    Mohammadi, Saeed
    Eftekhar, Ali A.
    Khelif, Abdelkrim
    Adibi, Ali
    [J]. PHOTONIC AND PHONONIC CRYSTAL MATERIALS AND DEVICES X, 2010, 7609
  • [22] Support Loss-free Micro/Nano-mechanical Resonators using Phononic Crystal Slab Waveguides
    Mohammadi, Saeed
    Eftekhar, Ali A.
    Adibi, Ali
    [J]. 2010 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS), 2010, : 521 - 523
  • [23] High-Q micromechanical resonators in a two-dimensional phononic crystal slab
    Mohammadi, Saeed
    Eftekhar, Ali Asghar
    Hunt, William D.
    Adibi, Ali
    [J]. APPLIED PHYSICS LETTERS, 2009, 94 (05)
  • [24] Evidence of large high frequency complete phononic band gaps in silicon phononic crystal plates
    Mohammadi, Saeed
    Eftekhar, Ali Asghar
    Khelif, Abdelkrim
    Hunt, William D.
    Adibi, Ali
    [J]. APPLIED PHYSICS LETTERS, 2008, 92 (22)
  • [25] MEMS technology for timing and frequency control
    Nguyen, Clark T. -C.
    [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2007, 54 (02) : 251 - 270
  • [26] Nguyen CTC, 1998, AEROSP CONF PROC, P445, DOI 10.1109/AERO.1998.686943
  • [27] Reducing Anchor Loss in MEMS Resonators Using Mesa Isolation
    Pandey, Manoj
    Reichenbach, Robert B.
    Zehnder, Alan T.
    Lal, Amit
    Craighead, Harold G.
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2009, 18 (04) : 836 - 844
  • [28] Absolute spectral gaps for infrared light and hypersound in three-dimensional metallodielectric phoxonic crystals
    Papanikolaou, N.
    Psarobas, I. E.
    Stefanou, N.
    [J]. APPLIED PHYSICS LETTERS, 2010, 96 (23)
  • [29] High-fidelity Modeling of MEMS resonators - Part 1: Anchor loss mechanisms through substrate
    Park, YH
    Park, KC
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2004, 13 (02) : 238 - 247
  • [30] BAND-STRUCTURE OF ELASTIC-WAVES IN 2-DIMENSIONAL SYSTEMS
    SIGALAS, M
    ECONOMOU, EN
    [J]. SOLID STATE COMMUNICATIONS, 1993, 86 (03) : 141 - 143
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