Surface oxidation process of a diamond-like carbon film analyzed by difference X-ray photoelectron spectroscopy

被引:11
作者
Takabayashi, Susumu [1 ,2 ]
Takahagi, Takayuki [2 ]
机构
[1] Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
[2] Hiroshima Univ, Grad Sch Adv Sci Matter, Dept Quantum Matter, Hiroshima 7398530, Japan
基金
日本学术振兴会;
关键词
diamond-like carbon (DLC); surface oxidation; X-ray photoelectron spectroscopy (XPS); difference spectrum; DIFFERENT ELECTRICAL RESISTIVITIES; GAS-PHASE DERIVATIZATION; AMORPHOUS-CARBON; FUNCTIONAL-GROUPS; CORONA-DISCHARGE; PHOTOEMISSION; XPS; GRAPHITE; COATINGS; SPECTRA;
D O I
10.1002/sia.5714
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Difference X-ray photoelectron spectroscopy (D-XPS) revealed the surface oxidation process of a diamond-like carbon (DLC) film. Evaluation of surface functional groups on DLC solely by the C 1s spectrum is difficult because the spectrum is broad and has a secondary asymmetric lineshape. D-XPS clarified the subtle but critical changes at the DLC surface caused by wet oxidation. The hydroxyl (C?OH) group was dominant at the oxidized surface. Further oxidized carbonyl (CO) and carboxyl (including carboxylate) (COO) groups were also obtained; however, the oxidation of CO to COO was suppressed to some extent because the reaction required C?C bond cleavage. Wet oxidation cleaved the aliphatic hydrogenated and non-hydrogenated sp(2) carbon bonds (C?H sp(2) and C?C sp(2)) to create a pair of C?OH and hydrogenated sp(3) carbon (C?H sp(3)) bonds. The reaction yield for C?H sp(2) was superior at the surface, suggesting that the DLC film was hydrogen rich at the surface. Oxidation of aromatic sp(2) rings or polycyclic aromatic hydrocarbons such as nanographite to phenols did not occur because of their resonance stabilization with electron delocalization. Non-hydrogenated sp(3) carbon (C?C sp(3)) bonds were not affected by oxidation, suggesting that these bonds are chemically inert. Copyright (c) 2014 John Wiley & Sons, Ltd.
引用
收藏
页码:345 / 349
页数:5
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