Absolute distance measurement by spectral interferometry through wavelet transform with frequency comb

被引:1
作者
Wu, Hanzhong [1 ]
Zhang, Fumin [1 ]
Qu, Xinghua [1 ]
机构
[1] Tianjin Univ, State Key Lab Precis Measurement Technol & Instru, Tianjin 300072, Peoples R China
来源
NINTH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION | 2015年 / 9446卷
关键词
absolute distance measurement; optical frequency comb; wavelet transform;
D O I
10.1117/12.2180834
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Wavelet transform (WT) was exploited to measure distances based on spectrum interferometry. Complex Morlet wavelet was used as the mother wavelet to obtain the amplitude graph and phase graph simultaneously, and the latter showed the wrapped phase in fact. The distances were measured numerically and experimentally, and each distance for ten times. Experimental results indicated that the distance could be obtained uniquely using wavelet transform, and the reproducibility deviation was 77.7 nm when the measured distance is about 1 mm.
引用
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页数:6
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