Suppression of suprathermal ions from a colloidal microjet target containing SnO2 nanoparticles by using double laser pulses

被引:17
作者
Higashiguchi, Takeshi
Kaku, Masanori
Katto, Masahito
Kubodera, Shoichi
机构
[1] Utsunomiya Univ, Opt Educ Res Ctr, Grad Sch Engn, Dept Environm Sci & Energy, Utsunomiya, Tochigi 321, Japan
[2] Miyazaki Univ, Photon Sci Ctr, Dept Elect Engn & Elect, Miyazaki 88921, Japan
关键词
D O I
10.1063/1.2799175
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have demonstrated suppression of suprathermal ions from a colloidal microjet target plasma containing tin-dioxide (SnO2) nanoparticles irradiated by double laser pulses. We observed a significant decrease of the tin and oxygen ion signals in the charged-state-separated energy spectra when double laser pulses were irradiated. The peak energy of the singly ionized tin ions decreased from 9 to 3 keV when a preplasma was produced. The decrease in the ion energy, considered as debris suppression, is attributed to the interaction between an expanding low-density preplasma and a main laser pulse.
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共 18 条
[1]   Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas [J].
Ando, Tsuyoshi ;
Fujioka, Shinsuke ;
Nishimura, Hiroaki ;
Ueda, Nobuyoshi ;
Yasuda, Yuzuri ;
Nagai, Keiji ;
Norimatsu, Takayoshi ;
Murakami, Masakatsu ;
Nishihara, Katsunobu ;
Miyanaga, Noriaki ;
Izawa, Yasukazu ;
Mima, Kunioki ;
Sunahara, Atsushi .
APPLIED PHYSICS LETTERS, 2006, 89 (15)
[2]   Energy spectra and charge states of debris emitted from laser-produced minimum mass tin plasmas [J].
Fujioka, Shinsuke ;
Nishimura, Hiroaki ;
Ando, Tstiyoshi ;
Ueda, Nobuyoshi ;
Namba, Shinichi ;
Aota, Tatsuya ;
Murakami, Masakatsu ;
Nishihara, Katsunobu ;
Kang, Young -G. ;
Sunahara, Atsushi ;
Furukawa, Hiroyuki ;
Shimada, Yoshinori ;
Hashimoto, Kazuhisa ;
Yamaura, Michiteru ;
Yasuda, Yuzuri ;
Nagai, Keiji ;
Norimatsu, Takayoshi ;
Miyanaga, Noriaki ;
Izawa, Yasukazu ;
Mima, Kunioki .
EMERGING LITHOGRAPHIC TECHNOLOGIES X, PTS 1 AND 2, 2006, 6151 :U1525-U1534
[3]   Extreme ultraviolet lithography [J].
Gwyn, CW ;
Stulen, R ;
Sweeney, D ;
Attwood, D .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (06) :3142-3149
[4]   Low-debris, efficient laser-produced plasma extreme ultraviolet source by use of a regenerative liquid microjet target containing tin dioxide (SnO2) nanoparticles [J].
Higashiguchi, T ;
Dojyo, N ;
Hamada, M ;
Sasaki, W ;
Kubodera, S .
APPLIED PHYSICS LETTERS, 2006, 88 (20)
[5]   Enhancement of conversion efficiency of extreme ultraviolet radiation from a liquid aqueous solution microjet target by use of dual laser pulses [J].
Higashiguchi, Takeshi ;
Dojyo, Naoto ;
Hamada, Masaya ;
Kawasaki, Kelta ;
Sasaki, Wataru ;
Kubodera, Shoichi .
EMERGING LITHOGRAPHIC TECHNOLOGIES X, PTS 1 AND 2, 2006, 6151 :U1571-U1578
[6]   Liquid-tin-jet laser-plasma extreme ultraviolet generation [J].
Jansson, PAC ;
Hansson, BAM ;
Hemberg, O ;
Otendal, M ;
Holmberg, A ;
de Groot, J ;
Hertz, HM .
APPLIED PHYSICS LETTERS, 2004, 84 (13) :2256-2258
[7]   EUV radiation characteristics of a CO2 laser produced Xe plasma [J].
Komori, H ;
Ueno, Y ;
Hoshino, H ;
Ariga, T ;
Soumagne, G ;
Endo, A ;
Mizoguchi, H .
APPLIED PHYSICS B-LASERS AND OPTICS, 2006, 83 (02) :213-218
[8]   Laser-produced plasma light source development for extreme ultraviolet lithography [J].
Komori, H ;
Soumagne, G ;
Abe, T ;
Suganuma, T ;
Imai, Y ;
Someya, H ;
Takabayashi, Y ;
Endo, A ;
Toyoda, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (6B) :3707-3712
[9]   Laser-produced-plasma light source development for extreme ultraviolet lithography [J].
Komori, H ;
Abe, T ;
Suganuma, T ;
Imai, Y ;
Sugimoto, Y ;
Someya, H ;
Hoshino, H ;
Soumagne, G ;
Takabayashi, Y ;
Mizoguchi, H ;
Endo, A ;
Toyoda, K ;
Horiike, Y .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (06) :2843-2847
[10]  
MIYAKE A, 2006, EUTC SOURCE WORKSHOP