Planar inductor equivalent circuit model taking into account magnetic permeability, loss tangent, skin and proximity effects versus frequency

In this paper, we present a new planar inductor model with magnetic layer. This equivalent circuit model takes into account the variation of the magnetic core permeability and the core losses versus frequency, the capacitive coupling between winding turns, the capacitive coupling between the external turn and the ground plane. In this model, we also consider the skin and the proximity effects. HFSS software is used for the simulation. In order to extract the different parameters of the equivalent circuit model, we have developed an optimization program. Inductors with one and two magnetic layers have been fabricated with thicknesses varying between 100 and 500 A mu m. A very good agreement between simulation results, experimental values and extracted parameters has been observed. The use of two magnetic layers allows to significantly increase the inductance value even with thin layers.