Three-dimensionally embedded indium tin oxide (ITO) films in photosensitive glass: a transparent and conductive platform for microdevices

被引：5
作者：
Beke, S. [1 ]
Koroesi, L. [2 ]
Sugioka, K. [1 ]
Midorikawa, K. [1 ]
Dekany, I. [2 ]
机构：
[1] RIKEN, Laser Technol Lab, Adv Sci Inst, Wako, Saitama 3510198, Japan
[2] Univ Szeged, Hungarian Acad Sci, Supramol & Nanostruct Mat Res Grp, H-6720 Szeged, Hungary
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2011年 / 102卷 / 02期
关键词：
FEMTOSECOND LASER; THIN-FILMS; OPTICAL-PROPERTIES; FABRICATION;
D O I：
10.1007/s00339-010-6173-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A new method for embedding transparent and conductive two- and three-dimensional microstructures in glass is presented. We show that the internal surface of hollow structures fabricated by femtosecond-laser direct writing inside the photosensitive glass can be coated by indium tin oxide (Sn-doped In2O3, ITO) using a sol-gel process. The idea of combining two transparent materials with different electrical properties, i.e., insulating and conductive, is very promising and hence it opens new prospects in manufacturing cutting edge microdevices, such as lab-on-a-chips (LOCs) and microelectromechanical systems (MEMS).
引用
收藏
页码：265 / 269
页数：5
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