Correlation of residual stress with optical absorption edge in diamond-like carbon films

被引：12
作者：
Kumar, S [1 ]
Dixit, PN [1 ]
Panwar, OS [1 ]
Bhattacharyya, R [1 ]
机构：
[1] Natl Phys Lab, Thin Film Technol Grp, New Delhi 110012, India
来源：
DIAMOND AND RELATED MATERIALS | 2003年 / 12卷 / 09期
关键词：
diamond-like carbon; stress; optical absorption edge; disorder;
D O I：
10.1016/S0925-9635(03)00245-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A correlation has been observed between the residual stress and the optical absorption edge of diamond-like carbon films and on the basis of this correlation, an empirical relation has been established between the Urbach energy (E-0) and the residual stress (S) in the films given by E-0 = E-00 + mS, where E-00 = 140 meV and m = 37 meV/GPa. The residual stress and the optical absorption edges of diamond-like carbon films, grown by different techniques, are then discussed in terms of amount of disorder in the network. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：1576 / 1583
页数：8
相关论文
共 50 条
  • [21] Modeling of optical constants of diamond-like carbon
    Franta, Daniel
    Bursikova, Vilma
    Necas, David
    Zajickova, Lenka
    DIAMOND AND RELATED MATERIALS, 2008, 17 (4-5) : 705 - 708
  • [22] Electrical and optical properties of diamond-like carbon
    Grill, A
    THIN SOLID FILMS, 1999, 355 : 189 - 193
  • [23] Cryogenic vacuum tribology of diamond and diamond-like carbon films
    Aggleton, M.
    Burton, J. C.
    Taborek, P.
    JOURNAL OF APPLIED PHYSICS, 2009, 106 (01)
  • [24] DIAMOND-LIKE CARBON COATING FOR OPTICAL WINDOWS
    HARSHAVARDHAN, KS
    IYER, SB
    JOURNAL OF THE INSTITUTION OF ELECTRONICS AND TELECOMMUNICATION ENGINEERS, 1994, 40 (2-3): : 97 - 100
  • [25] Stress properties of diamond-like amorphous carbon
    Kelires, PC
    PHYSICA B, 2001, 296 (1-3): : 156 - 162
  • [26] Characterization of crystalline diamond incorporated diamond-like carbon films
    Marciano, F. R.
    Bonetti, L. F.
    Lima-Oliveira, D. A.
    Mello, C. B.
    Ueda, M.
    Corat, E. J.
    Trava-Airoldi, V. J.
    DIAMOND AND RELATED MATERIALS, 2010, 19 (10) : 1139 - 1143
  • [27] Correlation between thickness and optical properties of thin diamond-like carbon films deposited with RF PACVD method
    Smietana, M.
    Korwin-Pawlowski, M. L.
    Grabarczyk, J.
    Szmidt, J.
    MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2009, 165 (1-2): : 132 - 134
  • [28] Diamond-like carbon films in multilayered interference coatings for IR optical elements
    Kutsay, OM
    Gontar, AG
    Novikov, NV
    Dub, SN
    Tkach, VN
    Gorshtein, BA
    Mozkova, OV
    DIAMOND AND RELATED MATERIALS, 2001, 10 (9-10) : 1846 - 1849
  • [29] Diamond-Like Carbon Films with Low Internal Stress by a Simple Bilayer Approach
    Baba, Koumei
    Hatada, Ruriko
    Flege, Stefan
    Ensinger, Wolfgang
    COATINGS, 2020, 10 (07)
  • [30] The influence of fluorine doping on the optical properties of diamond-like carbon thin films
    Ahmed, Sk. F.
    Banerjee, D.
    Chattopadhyay, K. K.
    VACUUM, 2010, 84 (06) : 837 - 842
12345