Correlation of residual stress with optical absorption edge in diamond-like carbon films

被引：12
|
作者：
Kumar, S [1 ]
Dixit, PN [1 ]
Panwar, OS [1 ]
Bhattacharyya, R [1 ]
机构：
[1] Natl Phys Lab, Thin Film Technol Grp, New Delhi 110012, India
来源：
DIAMOND AND RELATED MATERIALS | 2003年 / 12卷 / 09期
关键词：
diamond-like carbon; stress; optical absorption edge; disorder;
D O I：
10.1016/S0925-9635(03)00245-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A correlation has been observed between the residual stress and the optical absorption edge of diamond-like carbon films and on the basis of this correlation, an empirical relation has been established between the Urbach energy (E-0) and the residual stress (S) in the films given by E-0 = E-00 + mS, where E-00 = 140 meV and m = 37 meV/GPa. The residual stress and the optical absorption edges of diamond-like carbon films, grown by different techniques, are then discussed in terms of amount of disorder in the network. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：1576 / 1583
页数：8
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