Development of an RF-CMOS Surface Acoustic Wave (SAW) Resonator

被引：0
作者：
Sidek, F. [1 ]
Nordin, A. N. [1 ]
Zaghloul, M. E. [2 ]
机构：
[1] IIUM, Dept Elect & Comp Engn, Kuala Lumpur, Malaysia
[2] George Washington Univ, Washington, DC 20052 USA
来源：
2011 IEEE 54TH INTERNATIONAL MIDWEST SYMPOSIUM ON CIRCUITS AND SYSTEMS (MWSCAS) | 2011年
基金：
美国国家科学基金会;
关键词：
RF-CMOS; Surface Acoustic Wave Resonator; DEVICES; SYSTEM;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Surface Acoustic wave resonators serve as essential components in Radio Frequency (RF) electronics and transceiver circuits. SAW resonators are traditionally discrete components, fabricated on piezoelectric substrates making it incompatible with CMOS technology processes. This work proposes modeling and simulation of SAW resonators which are integrated in RF-CMOS technology. An equivalent circuit model developed specifically for RF-CMOS resonator is presented. Three design examples of these resonators are shown to demonstrate the characteristics of the resonators at different resonant frequencies. The comparison between the simulated and fabricated resonators have been presented.
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页数：4
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