Comparative study of perforated microcantilevers for MEMS applications

被引：0
|
作者：
Purohit, Soumya [1 ]
Pal, Prem [1 ]
Pandey, Ashok Kumar [2 ]
机构：
[1] Indian Inst Technol Hyderabad, Dept Phys, Sangareddy 502284, TS, India
[2] Indian Inst Technol Hyderabad, Dept Mech & Aerosp Engn, Sangareddy 502284, TS, India
来源：
2021 SYMPOSIUM ON DESIGN, TEST, INTEGRATION & PACKAGING OF MEMS AND MOEMS | 2021年
关键词：
MEMS; cantilever; perforations; PULL-IN VOLTAGE;
D O I：
10.1109/DTIP54218.2021.9568667
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, the circular, square and hexagonal perforations of size 2.5 mu m-14.5 mu m are considered and compared with a simple rectangular beam. Structural and coupled structural-electrostatic analyses are performed using COMSOL Metaphysics to obtain the results. As the perforation size increases, both resonance frequency and static deflection of the beam increase and the pull-in voltage decrease. Among all the proposed designs, design with hexagonal perforation has the highest resonance frequency of 34.5 kHz. Static deflection is found to be greater in beams with circular perforations. Beam with square perforations has the lowest pull-in voltage of 3.84 V.
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页数：4
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