Synthesis of flower-like tungsten nanoparticles by magnetron sputtering combined with gas aggregation

被引：54

作者：

Acsente, Tomy ^{[1
]}

Negrea, Raluca Florentina ^{[2
]}

Nistor, Leona Cristina ^{[2
]}

Logofatu, Constantin ^{[2
]}

Matei, Elena ^{[2
]}

Birjega, Ruxandra ^{[1
]}

Grisolia, Christian ^{[3
]}

Dinescu, Gheorghe ^{[1
]}

机构：

[1] Natl Inst Laser Plasma & Radiat Phys, Magurele 077125, Romania

[2] Natl Inst Mat Phys, Magurele 077125, Romania

[3] CEA, IRFM, F-13108 St Paul Les Durance, France

来源：

EUROPEAN PHYSICAL JOURNAL D | 2015年 / 69卷 / 06期

关键词：

THIN-FILMS; CLUSTER; PLASMA; MICROSTRUCTURE; TEMPERATURE; FABRICATION; MORPHOLOGY; STRESS; IMPACT; DUST;

D O I：

10.1140/epjd/e2015-60097-4

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present the synthesis of tungsten nanoparticles using a gas aggregation cluster source based on a magnetron sputtering discharge. The nanoparticles have sizes between 70 and 100 nm and a dendritic morphology, with branches emerging from the center and evolving in a flower-like pattern. Structural investigations revealed the presence of alpha-W and residual beta-W crystalline phases. Post deposition oxidation of the nanoparticles is also investigated.

引用

页数：7

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