Plasma cleaning of ITER First Mirrors in magnetic field

被引：38
作者：
Moser, Lucas [1 ]
Steiner, Roland [1 ]
Leipold, Frank [2 ]
Reichle, Roger [2 ]
Marot, Laurent [1 ]
Meyer, Ernst [1 ]
机构：
[1] Univ Basel, Dept Phys, CH-4056 Basel, Switzerland
[2] ITER Org, F-13115 St Paul Les Durance, France
来源：
JOURNAL OF NUCLEAR MATERIALS | 2015年 / 463卷
关键词：
PERFORMANCE;
D O I：
10.1016/j.jnucmat.2014.11.087
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
To avoid reflectivity losses in ITER's optical diagnostic systems, plasma sputtering of metallic First Mirrors is foreseen in order to remove deposits coming from the main wall (mainly beryllium and tungsten). Therefore plasma cleaning has to work on large mirrors (up to a size of 200 x 300 mm) and under the influence of strong magnetic fields (several Tesla). This work presents the results of plasma cleaning of aluminium and aluminium oxide (used as beryllium proxy) deposited on molybdenum mirrors. Using radio frequency (13.56 MHz) argon plasma, the removal of a 260 nm mixed aluminium/aluminium oxide film deposited by magnetron sputtering on a mirror (98 mm diameter) was demonstrated. 50 nm of pure aluminium oxide were removed from test mirrors (25 mm diameter) in a magnetic field of 0.35 T for various angles between the field lines and the mirrors surfaces. The cleaning efficiency was evaluated by performing reflectivity measurements, Scanning Electron Microscopy and X-ray Photoelectron Spectroscopy. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码：940 / 943
页数：4
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