Study of electromigration-induced formation of discrete voids in flip-chip solder joints by in-situ 3D laminography observation and finite-element modeling

被引:66
作者
Chang, Yuan-Wei [1 ,2 ]
Cheng, Yin [1 ,3 ]
Xu, Feng [1 ]
Helfen, Lukas [1 ,3 ,4 ]
Tian, Tian [5 ]
Di Michiel, Marco [4 ]
Chen, Chih [2 ]
Tu, King-Ning [5 ]
Baumbach, Tilo [1 ,3 ]
机构
[1] Karlsruhe Inst Technol, ANKA Inst Photon Sci & Synchrotron Radiat IPS, D-76344 Eggenstein Leopoldshafen, Germany
[2] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan
[3] Karlsruhe Inst Technol, Lab Applicat Synchrotron Radiat LAS, D-76049 Karlsruhe, Germany
[4] ESRF, 71 Ave Martyrs, F-38000 Grenoble, France
[5] Univ Calif Los Angeles, Dept Mat Sci & Engn, Los Angeles, CA 90095 USA
关键词
Electromigration; Flip-chip; Laminography; Synchrotron radiation; Finite-element modeling; RADIATION COMPUTED LAMINOGRAPHY; LARGE-SCALE-INTEGRATION; SYNCHROTRON-RADIATION; 3-DIMENSIONAL VISUALIZATION; INDUCED FAILURE; MICROTOMOGRAPHY; PROPAGATION; RESOLUTION; INTERCONNECTS; DEFORMATION;
D O I
10.1016/j.actamat.2016.06.059
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In the microelectronics industry the flip-chip (FC) technology is broadly used to enhance the packaging density. However, the small size and the unique geometry of the FC solder joints induce the electro-migration (EM) reliability issue. In this study, a pair of lead-free solder joints (SAC1205) was EM tested by a current of 7.5 x 10(3) A/cm(2). During the tests, X-ray laminography was applied to observe the microstructure evolution in-situ. Laminography enables the non-destructive observation of the bump microstructure and allows for a quantitative three-dimensional (3D) analysis. After EM testing for 650 h, a new EM failure mechanism was found, differing from the two well-known models, the pancake void propagation and the under-bump-metallization dissolution. Here, a few pre-existing small voids grew and simultaneously many new voids formed and grew over the entire EM testing period. Most of the nucleating voids were distributed in the current crowding region, a few also located in the low-current density region. As the testing time increased, voids increasingly coalesced with each other, forming a porous network which occupied a large part of the interface area and caused the EM failure. A finite element (FE) method was then applied to analyze the interplay between the microstructure evolution and current density redistribution. A series of 3D FE models was built based on the laminography images for the different testing stages. The current density distribution from the FE analysis indicates that the formation of discrete voids did not affect the global current density distribution until a major coalescence of the voids occurred. The relieving of the global current crowding in the pancake void model was not found in this new EM failure mechanism. It was the local current crowding around individual void found in the new mechanism that is held responsible for the EM retardation. (C) 2016 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码:100 / 110
页数:11
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