Shape-controllable, bottom-up fabrication of microlens using oblique angle deposition

被引：7

作者：

Choi, Hee Ju ^{[1
]}

Kang, Eun Kyu ^{[2
]}

Ju, Gun Wu ^{[2
]}

Song, Young Min ^{[2
]}

Lee, Yong Tak ^{[2
]}

机构：

[1] Gwangju Inst Sci & Technol, Dept Phys & Photon Sci, Kwangju 500712, South Korea

[2] Gwangju Inst Sci & Technol, Sch Elect Engn & Comp Sci EECS, Kwangju 500712, South Korea

来源：

OPTICS LETTERS | 2016年 / 41卷 / 14期

关键词：

LIGHT-EMITTING-DIODES; EXTRACTION EFFICIENCY; MICROSPHERE ARRAYS; ENHANCEMENT; MICROSCOPY;

D O I：

10.1364/OL.41.003328

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This Letter reports a novel method for the simple fabrication of microlens arrays with a controlled shape and diameter on glass substrates. Multilayer stacks of silicon dioxide deposited by oblique angle deposition with hole mask patterns enable microlens formation. Precise control of mask height and distance, as well as oblique angle steps between deposited layers, supports the controllability of microlens geometry. The fabricated microlens arrays with designed geometry exhibit uniform optical properties. (C) 2016 Optical Society of America

引用

页码：3328 / 3330

页数：3

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