Synthesis and characterization of SnO2 thin films using metalorganic precursors

被引:11
|
作者
Nwanna, Emeka Charles [1 ]
Imoisili, Patrick Ehi [1 ]
Jen, Tien-Chien [1 ]
机构
[1] Univ Johannesburg, Fac Engn & Built Environm, Dept Mech Engn Sci, ZA-2006 Johannesburg, South Africa
关键词
Tin oxide; Thin films; Spin-coating; ATOMIC LAYER DEPOSITION; OPTICAL-PROPERTIES; ELECTRICAL-PROPERTIES; TIN; TRANSPARENT;
D O I
10.1016/j.jksus.2022.102123
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Tetrakis (dimethylamino) tin(IV) (TDMASn) is a metal organic precursor used for fabricating transparent conducting tin oxide (SnO2) thin films via atomic layer deposition process (ALD). This study reported for the first time, a spin coating fabrication process of transparent conducting SnO2 thin films using TDMASn as the precursor for electrode materials of solar cells substrate. The samples were prepared using sol-gel spin-coating process and annealed at different temperatures to form metastable crystal structured SnO2 thin films. The manufactured thin films consequently underwent X-ray diffraction (XRD), scanning electron microscope (SEM), UV-vis spectroscopy, and resistivity analysis. The XRD analysis certified the films to be of polycrystalline structure, with the SEM results revealing variations in film thicknesses. The UV- vis analysis demonstrated a peak absorption band at 250 nm, while the highest transmittance of 83.2% in the visible range was noticed at the 550 ? sample.(c) 2022 The Author(s). Published by Elsevier B.V. on behalf of King Saud University. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/).
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页数:7
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