Thermal activation and deactivation of grown-in defects limiting the lifetime of float-zone silicon

被引:88
作者
Grant, Nicholas E. [1 ]
Markevich, Vladimir P. [2 ,3 ]
Mullins, Jack [2 ,3 ]
Peaker, Anthony R. [2 ,3 ]
Rougieux, Fiacre [1 ]
Macdonald, Daniel [1 ]
机构
[1] Australian Natl Univ, Coll Engn & Comp Sci, Res Sch Engn, GPO Box 4, Canberra, ACT 2601, Australia
[2] Univ Manchester, Photon Sci Inst, Manchester M13 9PL, Lancs, England
[3] Univ Manchester, Sch Elect & Elect Engn, Manchester M13 9PL, Lancs, England
来源
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS | 2016年 / 10卷 / 06期
基金
英国工程与自然科学研究理事会; 澳大利亚研究理事会;
关键词
float-zone silicon; heat treatment; charge carrier lifetimes; defects; vacancies; DISLOCATION-FREE; CRYSTAL-GROWTH; WAFERS;
D O I
10.1002/pssr.201600080
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
By studying the minority carrier lifetime in recently manufactured commercially available n- and p-type float-zone (FZ) silicon from five leading suppliers, we observe a very large reduction in the bulk lifetime when FZ silicon is heat-treated in the range 450-700 degrees C. Photoluminescence imaging of these samples at the wafer scale revealed concentric circular patterns, with higher recombination occurring in the centre, and far less around the periphery. Deep level transient spectroscopy measurements indicate the presence of recombination active defects, including a dominant center with an energy level at similar to E-v + 0.5 eV. Upon annealing FZ silicon at temperatures > 1000 degrees C in oxygen, the lifetime is completely recovered, whereby the defects vanish and do not reappear upon subsequent annealing at 500 degrees C. We conclude that the heat-treatments at >1000 degrees C result in total annihilation of the recombination active defects. Without such high temperature treatments, the minority carrier lifetime in FZ silicon is unstable and will affect the development of high efficiency (>24%) solar cells and surface passivation studies.
引用
收藏
页码:443 / 447
页数:5
相关论文
共 17 条
  • [1] Generation and annihilation of point defects by doping impurities during FZ silicon crystal growth
    Abe, Takao
    [J]. JOURNAL OF CRYSTAL GROWTH, 2011, 334 (01) : 4 - 15
  • [2] Intrinsic point defect behavior in silicon crystals during growth from the melt: A model derived from experimental results
    Abe, Takao
    Takahashi, Toru
    [J]. JOURNAL OF CRYSTAL GROWTH, 2011, 334 (01) : 16 - 36
  • [3] [Anonymous], 2014, TOPSIL APPL NOTE
  • [4] SOME EFFECTS OF CRYSTAL-GROWTH PARAMETERS ON MINORITY-CARRIER LIFETIME IN FLOAT-ZONED SILICON
    CISZEK, TF
    WANG, TH
    SCHUYLER, T
    ROHATGI, A
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1989, 136 (01) : 230 - 234
  • [5] Laplace-transform deep-level spectroscopy: The technique and its applications to the study of point defects in semiconductors
    Dobaczewski, L
    Peaker, AR
    Nielsen, KB
    [J]. JOURNAL OF APPLIED PHYSICS, 2004, 96 (09) : 4689 - 4728
  • [6] Grant Nicholas E., 2016, Solid State Phenomena, V242, P120, DOI 10.4028/www.scientific.net/SSP.242.120
  • [7] Grown-in defects limiting the bulk lifetime of p-type float-zone silicon wafers
    Grant, N. E.
    Rougieux, F. E.
    Macdonald, D.
    Bullock, J.
    Wan, Y.
    [J]. JOURNAL OF APPLIED PHYSICS, 2015, 117 (05)
  • [8] Light Enhanced Hydrofluoric Acid Passivation: A Sensitive Technique for Detecting Bulk Silicon Defects
    Grant, Nicholas E.
    [J]. JOVE-JOURNAL OF VISUALIZED EXPERIMENTS, 2016, (107):
  • [9] Evaluation of the Bulk Lifetime of Silicon Wafers by Immersion in Hydrofluoric Acid and Illumination
    Grant, Nicholas E.
    McIntosh, Keith R.
    Tan, Jason T.
    [J]. ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2012, 1 (02) : P55 - P61
  • [10] Manipulation of Hydrogen Charge States for Passivation of P-Type Wafers in Photovoltaics
    Hamer, P.
    Hallam, B.
    Wenham, S.
    Abbott, M.
    [J]. IEEE JOURNAL OF PHOTOVOLTAICS, 2014, 4 (05): : 1252 - 1260