Excimer laser ablation of Al2O3-TiC ceramics:: laser induced modifications of surface topography and structure

被引:28
作者
Oliveira, V
Vilar, R
Conde, O
机构
[1] Inst Super Tecn, Dept Mat Engn, P-1096 Lisbon, Portugal
[2] Univ Lisbon, Fac Ciencias, Dept Fis, P-1700 Lisbon, Portugal
关键词
excimer laser ablation; ceramic; fluence;
D O I
10.1016/S0169-4332(97)00751-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Samples of an Al(2)O(3)-34 wt% TiC ceramic were processed with KrF excimer laser radiation (248 nm), using a fluence in the range 2 to 8 J/cm(2). The roughness and the ablation rate vary considerably with increasing number of pulses, reaching a constant value at > 200 pulses. In stationary regime, they both increase when fluence increases. Laser processing results on the formation of a globular topography recast layer by a selective ablation process, alumina being rapidly laser sputtered by an electronic mechanism, while titanium carbide is thermally ablated. (C) 1998 Elsevier Science B.V.
引用
收藏
页码:831 / 836
页数:6
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