Vertical Comb Drive Microscanners for Beam Steering, Linear Scanning and Laser Projection Applications

被引：26

作者：

Jung, Denis ^{[1
]}

Sandner, Thilo ^{[1
]}

Kallweit, David ^{[1
]}

Schenk, Harald ^{[1
]}

机构：

[1] Fraunhofer IPMS Dresden, Dresden, Germany

来源：

MOEMS AND MINIATURIZED SYSTEMS XI | 2012年 / 8252卷

关键词：

micro scanning mirror; quasistatic actuation; vertical comb drive; linearized raster scanning; laser projection;

D O I：

10.1117/12.906690

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes in detail our concept of quasi-static micro scanning mirrors enabling large static deflections and linearized scanning using vertical out-of-plane comb drives. The vertical comb configuration is realized from a planar scanner substrate by wafer bonding. The device concept is highly flexible by design; different kinds of vertical combs (e. g. staggered and angular) can be realized without changing the technological process flow but by design modifications, only. First demonstrator devices are presented: a) quasi-static 1D-scanners with 4 mm mirror diameter and +/- 7.5 degrees mechanical tilt angle for beam steering and b) a quasi-static / resonant 2D-scanner enabling 2D raster scanning with SVGA resolution.

引用

页数：10

共 10 条

[1] Monolithically cascaded micromirror pair driven by angular vertical combs for two-axis scanning [J].