Superhard TiAlCN coatings prepared by radio frequency magnetron sputtering

被引：36

作者：

Zeng, Yuqiao ^{[1
]}

Qiu, Yuedong ^{[1
]}

Mao, Xiangyang ^{[2
]}

Tan, Shuyong ^{[2
]}

Tan, Zhen ^{[1
]}

Zhang, Xuhai ^{[1
]}

Chen, Jian ^{[1
]}

Jiang, Jianqing ^{[1
]}

机构：

[1] Southeast Univ, Sch Mat Sci & Engn, Jiangsu Key Lab Adv Metall Mat, Nanjing 211189, Jiangsu, Peoples R China

[2] Nanjing Inst Technol, Sch Mat Sci & Engn, Nanjing 211167, Jiangsu, Peoples R China

来源：

THIN SOLID FILMS | 2015年 / 584卷

基金：

中国国家自然科学基金;

关键词：

Titanium aluminum carbo-nitride; Vapor deposition; Hard coatings; Mechanical properties; Magnetron sputtering deposition; TRIBOLOGICAL PROPERTIES; TIN; BEHAVIOR; STEEL; FILMS; TICN; DEPOSITION; CARBON;

D O I：

10.1016/j.tsf.2015.02.068

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work, we report on the formation of super-hard TiAlCN coatings developed through radio frequency magnetron sputtering. The phases and the mechanical properties of the TiAlCN coatings can be tailored by adjusting the carbon and nitrogen contents. Moreover, the TiAlCN coating with an optimized carbon and nitrogen content exhibits a hardness exceeding 40 GPa. The refined nanocomposite structure was composed of face-centered cubic (Ti,Al)(C,N), hexagonal close-packed AlN crystals and amorphous carbon that may contribute to the superior hardness. (C) 2015 Elsevier B.V. All rights reserved.

引用

页码：283 / 288

页数：6

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