Effect of capillary formation on friction and pull-off forces measured on submicron-size asperities

被引:22
作者
Ando, Y [1 ]
机构
[1] Natl Inst Adv Ind Sci & Technol AIST, Tribol Grp, Tsukuba, Ibaraki 3058564, Japan
关键词
Laplace pressure; relative humidity; atomic force microscope; high temperature; high vacuum; water condensation;
D O I
10.1007/s11249-004-4262-1
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
Asperities with hemispherical peaks were fabricated on a silicon substrate using a focused ion beam. Pull-off and friction forces were measured on each asperity using atomic force microscopy (AFM) in high vacuum (HV) of 2x10(-5) Pa. The probe of the AFM cantilever had a flat square tip, approximately 1x1 mu m(2) in area. The radius of curvature of the asperity peaks ranged from 70 to 610 nm. The results showed that the pull-off force was roughly proportional to this radius. The friction force was proportional to the pull-off force. Effects of the substrate temperature on pull-off force on a plane (the flat substrate) and friction force on an asperity were also examined. The pull-off force on the flat substrate increased with increasing contact time at a substrate temperature of 100 degrees C or lower, but was independent of contact time at 190 degrees C or higher. This suggests that the capillary cannot form at a substrate temperature of 190 degrees C or higher. The friction force increased with lower sliding velocities at 100 degrees C or lower, suggesting the capillary has a lubricating effect that prevents direct solid contact.
引用
收藏
页码:29 / 36
页数:8
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