Suppression of pull-in in a microstructure actuated by mechanical shocks and electrostatic forces

被引：15

作者：

Lakrad, Faouzi ^{[1
]}

Belhaq, Mohamed ^{[1
]}

机构：

[1] Univ Hassan II Casablanca, Lab Mech, Casablanca, Morocco

来源：

INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS | 2011年 / 46卷 / 02期

关键词：

Pull-in; Capacitive MEMS; High-frequency voltage; Shock; Control; FREQUENCY; RESONATORS; DYNAMICS;

D O I：

10.1016/j.ijnonlinmec.2010.10.006

中图分类号：

O3 [力学];

学科分类号：

08 ; 0801 ;

摘要：

This work investigates the effect of a high-frequency voltage (HFV) on the pull-in instability in a microstructure actuated by mechanical shocks and electrostatic forces. The microstructure is modelled as a single-degree-of-freedom mass-spring-damper system. The method of direct partition of motion is used to split the fast and slow dynamics. Analysis of steady-state solutions of the slow dynamic allows the investigation of the influence of the HFV on the pull-in. The results show that adding HFV rigidifies the system, creates new stable equilibria and suppresses the pull-in instability for adequate high-frequency voltages. To illustrate the applicability of the result, a specific capacitive microelectromechanical system consisting of a clamped-clamped microbeam is considered. (C) 2010 Elsevier Ltd. All rights reserved.

引用

页码：407 / 414

页数：8

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