The rate sensitivity and plastic deformation of nanocrystalline tantalum films at nanoscale

被引：14

作者：

Cao, Zhenhua ^{[1
,2
]}

She, Qianwei ^{[1
,2
]}

Huang, Yongli ^{[3
]}

Meng, Xiangkang ^{[1
,2
]}

机构：

[1] Nanjing Univ, Natl Lab Solid State Microstruct, Nanjing 210093, Peoples R China

[2] Nanjing Univ, Dept Mat Sci & Engn, Nanjing 210093, Peoples R China

[3] Xiangtan Univ, Key Lab Low Dimens Mat & Applicat Technol, Minist Educ, Fac Mat & Photoelect Phys, Xiangtan 411105, Peoples R China

来源：

NANOSCALE RESEARCH LETTERS | 2011年 / 6卷

关键词：

STRAIN-RATE SENSITIVITY; MOLECULAR-DYNAMICS SIMULATION; METAL-FILMS; THIN-FILMS; CREEP; SIZE; CU; NI; NANOINDENTATION; STRENGTH;

D O I：

10.1186/1556-276X-6-186

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Nanoindentation creep and loading rate change tests were employed to examine the rate sensitivity (m) and hardness of nanocrystalline tetragonal Ta films. Experimental results suggested that the m increased with the decrease of feature scale, such as grain size and indent depth. The magnitude of m is much less than the corresponding grain boundary (GB) sliding deformation with m of 0.5. Hardness softening behavior was observed for smaller grain size, which supports the GB sliding mechanism. The rate-controlling deformation was interpreted by the GB-mediated processes involving atomic diffusion and the generation of dislocation at GB.

引用

页数：6

共 38 条

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