A floating gate MOSFET dosimeter requiring no external bias supply

被引:41
作者
Tarr, NG [1 ]
Mackay, GF
Shortt, K
Thomson, I
机构
[1] Carleton Univ, Dept Elect, Ottawa, ON K1S 5B6, Canada
[2] Thomson & Nielsen Elect, Nepean, ON K2H 8S1, Canada
[3] Natl Res Council Canada, Div Phys, Ottawa, ON K1A 0R6, Canada
关键词
D O I
10.1109/23.685225
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
MOSFET dosimeters incorporating an electrically floating polysilicon gate have been fabricated in a commercial CMOS technology. Charge is placed on the floating gate by tunnelling from a small overlapping injector gate. Subsequent irradiation partially discharges the floating gate, producing a change in threshold voltage which can be used to infer the absorbed dose. No external power source is required during this sensing period. Sensitivities up to 70mVGy(-1) (0.7 mV/rad) have been obtained for temperature-compensated matched-pair dosimeters under Co-60 gamma irradiation.
引用
收藏
页码:1470 / 1474
页数:5
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