Optical readout method based on a narrow-strip filter for microcantilever array sensing

被引：13

作者：

Gong, Cheng ^{[1
]}

Hui, Mei ^{[1
]}

Dong, Liquan ^{[1
]}

Zhao, Yuejin ^{[1
]}

Yu, Xiaomei ^{[2
]}

Liu, Xiaohua ^{[1
]}

机构：

[1] Beijing Inst Technol, Sch Optoelect, Beijing 100081, Peoples R China

[2] Peking Univ, Inst Microelect, Beijing 100871, Peoples R China

来源：

OPTICS LETTERS | 2012年 / 37卷 / 07期

基金：

中国国家自然科学基金;

关键词：

INFRARED IMAGING-SYSTEM; DETECTOR;

D O I：

10.1364/OL.37.001187

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An effective optical readout approach based on a narrow-strip filter is presented to detect bends of a bimaterial microcantilever focal plane array, by which light intensity of the image plane (CCD image sensor plane) can be increased and its uniformity on the image plane effectively enhanced. It reduces the noise equivalent temperature difference of the microcantilever focal plane array IR imaging system and improves uniformity of the IR images. A comparative experiment is designed to verify effectiveness. The experimental results show that the proposed method has advantages of preferable effect. (C) 2012 Optical Society of America

引用

页码：1187 / 1189

页数：3

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