Transparent conductive ITO thin films prepared by colloid

被引:0
|
作者
Liu, JX [1 ]
Gan, Y [1 ]
Piao, SJ [1 ]
机构
[1] Beijing Univ Chem Technol, Coll Mat Sci & Engn, Key Lab Sci & Technol Controllable Chem React, Minist Educ, Beijing 100029, Peoples R China
关键词
colloid method; ITO; film; microstructure;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The transparent conduction ITO films were prepared on a soda lime float glass substrate by colloid technique. The colloidal solutions were made from indium metal ingots and hydrous tin (IV) chloride. The particle sizes of the colloid were observed using TEM. The optical properties of the ITO films were investigated using a spectrophotometer. The four-probe instrument measured the electrical resistances of the films. XRD, SEM and AES analyzed the structure and morphology of the ITO films. The results indicate that the particle size is in the range 2 nm similar to 15 nm and the dispersal and stability of the colloid solution is good. The sheet resistance values of films decrease with the increase of the coating thickness or the annealing temperature. In the wavelength range of 360 nm similar to 800 nm, the coating thickness of ITO films has a different effect on the transmittance. The sheet resistance of 300 nm ITO films annealed at 600 degrees C is 258 ohms per square. The ITO films have 89.6% transmittance at 550 nm wavelengths, and their surfaces were relatively uniform.
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页码:1169 / 1172
页数:4
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