High Transparency and Electrical Conductivity of SnO2:Nb Thin Films Formed through (001)-Oriented SnO:Nb on Glass Substrate

被引：17

作者：

Suzuki, Ai Yoshie ^{[1
]}

Nose, Kenji ^{[1
]}

Ueno, Ai ^{[1
]}

Kamiko, Masao ^{[1
]}

Mitsuda, Yoshitaka ^{[1
]}

机构：

[1] Univ Tokyo, Inst Ind Sci, Meguro Ku, Tokyo 1538505, Japan

来源：

APPLIED PHYSICS EXPRESS | 2012年 / 5卷 / 01期

关键词：

ELECTRONIC-STRUCTURE; OXIDATION; SB;

D O I：

10.1143/APEX.5.011103

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Nb-doped (101)-oriented SnO2 (SnO2:Nb) thin films were fabricated through postdeposition thermal annealing of (001)-oriented Nb-doped SnO films grown on glass substrates using pulsed laser deposition. Nb doping resulted in an anisotropic lattice deformation explained by Nb in Sn site. Resistivity, electron concentration, and mobility values of 3.7 x 10(-3) Omega cm, 6.5 x 10(19) cm(-3), and 26 cm V-1 s(-1), respectively, were achieved in the films at room temperature for a dopant concentration of 1 at.%. The optical band gap increased from 3.9 to 4.1 eV with Nb doping >= 1 at. %. (C) 2012 The Japan Society of Applied Physics

引用

页数：3

共 28 条

[1] ESCA STUDIES OF SOME NIOBIUM COMPOUNDS [J].

BAHL, MK .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1975, 36 (06) :485-491

[2] ANOMALOUS OPTICAL ABSORPTION LIMIT IN INSB [J].

BURSTEIN, E .

PHYSICAL REVIEW, 1954, 93 (03) :632-633

[3] Oxidation process from SnO to SnO2 [J].

Choi, WK ;

Sung, H ;

Kim, KH ;

Cho, JS ;

Choi, SC ;

Jung, HJ ;

Koh, SK ;

Lee, CM ;

Jeong, K .

JOURNAL OF MATERIALS SCIENCE LETTERS, 1997, 16 (19) :1551-1554

[4] TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].

CHOPRA, KL ;

MAJOR, S ;

PANDYA, DK .

THIN SOLID FILMS, 1983, 102 (01) :1-46

[5] A transparent metal:: Nb-doped anatase TiO2 -: art. no. 252101 [J].

Furubayashi, Y ;

Hitosugi, T ;

Yamamoto, Y ;

Inaba, K ;

Kinoda, G ;

Hirose, Y ;

Shimada, T ;

Hasegawa, T .

APPLIED PHYSICS LETTERS, 2005, 86 (25) :1-3

[6] SNO FILMS AND THEIR OXIDATION TO SNO2 - RAMAN-SCATTERING, IR REFLECTIVITY AND X-RAY-DIFFRACTION STUDIES [J].

GEURTS, J ;

RAU, S ;

RICHTER, W ;

SCHMITTE, FJ .

THIN SOLID FILMS, 1984, 121 (03) :217-225

[7]

Goetzberger A, 2000, SOL ENERGY, V69, P45

[8] Investigations on the structural, optical and electrical properties of Nb-doped SnO2 thin films [J].

Gokulakrishnan, V. ;

Parthiban, S. ;

Jeganathan, K. ;

Ramamurthi, K. .

JOURNAL OF MATERIALS SCIENCE, 2011, 46 (16) :5553-5558

[9] Criteria for choosing transparent conductors [J].

Gordon, RG .

MRS BULLETIN, 2000, 25 (08) :52-57

[10] Electrical and mechanical properties of SnO2:Nb films for touch screens [J].

Kikuchi, N ;

Kusano, E ;

Kishio, E ;

Kinbara, A .

VACUUM, 2002, 66 (3-4) :365-371

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