A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS

被引：0
|
作者：
Yamane, Daisuke [1 ]
Otobe, Shota [1 ]
Atsumi, Ken [1 ]
Koga, Tatsuya [1 ]
Konishi, Toshifumi [2 ]
Safu, Teruaki [2 ]
Iida, Shinichi [2 ]
Ito, Hiroyuki [1 ]
Ishihara, Noboru [1 ]
Machida, Katsuyuki [1 ]
Masu, Kazuya [1 ]
机构：
[1] Tokyo Inst Technol, Yokohama, Kanagawa, Japan
[2] NTT Adv Technol Corp, Atsugi, Kanagawa, Japan
来源：
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2019年
关键词：
SENSOR;
D O I：
10.1109/memsys.2019.8870627
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a low-noise and high-sensitivity surface-micromachined 3-axis MEMS accelerometer for sub-mG (1 G=9.8 m/s(2) ) sensing. 3-D parallel-plate (3D-PP) electrodes for a single high-density proof mass made of gold are proposed for the first time, and the device characteristics are experimentally evaluated. When compared with conventional devices, the Brownian noise is nearly three orders of magnitude smaller and the capacitance sensitivity is two-to-three orders of magnitude larger.
引用
收藏
页码：684 / 687
页数：4
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