In-situ high-resolution electron microscopy study on a surface reconstruction of Au-deposited Si at very high temperatures

被引:16
作者
Kamino, T
Yaguchi, T
Tomita, M
Saka, H
机构
[1] HITACHI LTD,INSTRUMENT DIV,HITACHINAKA,IBARAKI 312,JAPAN
[2] NAGOYA UNIV,DEPT QUANTUM ENGN,NAGOYA,AICHI 46401,JAPAN
来源
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES | 1997年 / 75卷 / 01期
关键词
D O I
10.1080/01418619708210285
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In-situ high-temperature high-resolution electron microscopy was applied to st study of the surface modification of Au-deposited Si. The experiment was carried out above the melting points of small particles of Au (approximately several nanometres in diameter) in a 300 kV high-resolution analytical transmission electron microscope equipped with a direct-heating-type specimen-heating holder in a vacuum of 4-6 x 10(-6) Pa. Facet-unfacet transformation and reconstruction of the Si{111}, {001}, {211} and {311} surfaces induced by wetting of molten Au atoms have been observed at near-atomic resolution. It is concluded that molten Au atoms remove a surface amorphous layer on the Si surface, making the surface clean even in a non ultra-high vacuum.
引用
收藏
页码:105 / 114
页数:10
相关论文
共 14 条