In-situ high-resolution electron microscopy study on a surface reconstruction of Au-deposited Si at very high temperatures

被引:16
作者
Kamino, T
Yaguchi, T
Tomita, M
Saka, H
机构
[1] HITACHI LTD,INSTRUMENT DIV,HITACHINAKA,IBARAKI 312,JAPAN
[2] NAGOYA UNIV,DEPT QUANTUM ENGN,NAGOYA,AICHI 46401,JAPAN
来源
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES | 1997年 / 75卷 / 01期
关键词
D O I
10.1080/01418619708210285
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In-situ high-temperature high-resolution electron microscopy was applied to st study of the surface modification of Au-deposited Si. The experiment was carried out above the melting points of small particles of Au (approximately several nanometres in diameter) in a 300 kV high-resolution analytical transmission electron microscope equipped with a direct-heating-type specimen-heating holder in a vacuum of 4-6 x 10(-6) Pa. Facet-unfacet transformation and reconstruction of the Si{111}, {001}, {211} and {311} surfaces induced by wetting of molten Au atoms have been observed at near-atomic resolution. It is concluded that molten Au atoms remove a surface amorphous layer on the Si surface, making the surface clean even in a non ultra-high vacuum.
引用
收藏
页码:105 / 114
页数:10
相关论文
共 14 条
[1]   SMALL PARTICLE MELTING OF PURE METALS [J].
ALLEN, GL ;
BAYLES, RA ;
GILE, WW ;
JESSER, WA .
THIN SOLID FILMS, 1986, 144 (02) :297-308
[2]  
BIFFAT P, 1976, PHYS REV, V3, P2287
[3]   AU/SI(111) - ANALYSIS OF THE (SQUARE-ROOT 3 X SQUARE-ROOT 3)R30-DEGREES AND 6X6 STRUCTURES BY INPLANE X-RAY-DIFFRACTION [J].
DORNISCH, D ;
MORITZ, W ;
SCHULZ, H ;
FEIDENHANSL, R ;
NIELSEN, M ;
GREY, F ;
JOHNSON, RL .
PHYSICAL REVIEW B, 1991, 44 (20) :11221-11230
[4]  
HRICOVINI K, 1989, SURF SCI, V211, P212
[5]   A NEWLY DEVELOPED HIGH-RESOLUTION HOT STAGE AND ITS APPLICATION TO MATERIALS CHARACTERIZATION [J].
KAMINO, T ;
SAKA, H .
MICROSCOPY MICROANALYSIS MICROSTRUCTURES, 1993, 4 (2-3) :127-135
[7]   AU ON THE SI(001) SURFACE - ROOM-TEMPERATURE GROWTH [J].
LIN, XF ;
NOGAMI, J .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (03) :2090-2093
[8]   ATOMIC-STRUCTURE OF SI(111)-(5X2)-AU FROM HIGH-RESOLUTION ELECTRON-MICROSCOPY AND HEAVY-ATOM HOLOGRAPHY [J].
MARKS, LD ;
PLASS, R .
PHYSICAL REVIEW LETTERS, 1995, 75 (11) :2172-2175
[9]   HIGH-RESOLUTION ELECTRON-MICROSCOPY STUDY OF SPONTANEOUS ALLOYING IN GOLD CLUSTERS [J].
MORI, H ;
YASUDA, H ;
KAMINO, T .
PHILOSOPHICAL MAGAZINE LETTERS, 1994, 69 (05) :279-283
[10]   LEED-AES STUDY OF THE AU-SI(100) SYSTEM [J].
OURA, K ;
HANAWA, T .
SURFACE SCIENCE, 1979, 82 (01) :202-214