Using surface active random copolymers to control the domain orientation in diblock copolymer thin films

被引:305
作者
Huang, E [1 ]
Russell, TP
Harrison, C
Chaikin, PM
Register, RA
Hawker, CJ
Mays, J
机构
[1] Univ Massachusetts, Dept Polymer Sci & Engn, Silvio O Conte Natl Ctr Polymer Res, Amherst, MA 01003 USA
[2] Princeton Univ, Dept Phys, Princeton, NJ 08544 USA
[3] Princeton Univ, Dept Chem Engn, Princeton, NJ 08544 USA
[4] IBM Corp, Almaden Res Ctr, San Jose, CA 95120 USA
[5] Univ Alabama Birmingham, Dept Chem, Birmingham, AL 35294 USA
关键词
D O I
10.1021/ma980705+
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
The structure of thin films of a symmetric diblock copolymer, P(dS-b-MMA) (dS = perdeuterated styrene, MMA = methyl methacrylate), was investigated near preferential and nonpreferential (neutral) surfaces. Neutral surfaces were achieved at the substrate and air interfaces by localizing random copolymer, P(S-r-MMA), having a styrene fraction of 0.60, to each of these interfaces. This was performed by chemically grafting the random copolymer to the substrate and anchoring a surface active random copolymer having a perfluorinated end group to the air interface, respectively. Neutron reflectivity and small-angle neutron scattering were used to determine the orientation of the lamellar microdomains for films having various boundary conditions. Successive steps of CF4 reactive ion etching followed by field emission scanning electron microscopy were used to ascertain the orientation of the microdomains as a function of film depth. For films confined between two continuous neutral surfaces, the orientation of the lamellar microdomains is observed to be perpendicular to the film surfaces throughout the entire film thickness.
引用
收藏
页码:7641 / 7650
页数:10
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