Non-linearity of diffusion in amorphous Si-Ge multilayers

被引：13

作者：

Csik, A ^{[1
]}

Beke, DL ^{[1
]}

Langer, GA ^{[1
]}

Erdelyi, Z ^{[1
]}

Daróczi, L ^{[1
]}

Kapta, K ^{[1
]}

Kis-Varga, M ^{[1
]}

机构：

[1] Univ Debrecen, Dept Solid State Phys, H-4100 Debrecen, Hungary

来源：

VACUUM | 2001年 / 61卷 / 2-4期

关键词：

Si-Ge amorphous multilayers; interdiffusion; X-ray diffraction; RBS;

D O I：

10.1016/S0042-207X(01)00133-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Compositionally modulated amorphous Si-Ge thin films with repeat lengths between 2.5 and 9 nm have been prepared using magnetron sputtering. The interdiffusion coefficient (D) was determined from the change in the small angle X-ray diffraction satellite (SAXRD) intensities. Experimental results confirm the theoretically predicted strong concentration dependence of the interdiffusion coefficient. It is illustrated that it is possible to determine the concentration dependence of D from one (curved) decay plot of SAXRB intensities as well as from Rutherford backscattering measurements. (C) 2001 Elsevier Science Ltd. All rights reserved.

引用

页码：297 / 301

页数：5

共 16 条

[1]

AUCIELLO O, 1989, NATO ASI, V234

[2] Thermal stability of amorphous and crystalline multilayers produced by magnetron sputtering [J].

Beke, DL ;

Langer, GA ;

Kis-Varga, M ;

Dudas, A ;

Nemes, P ;

Daroczi, L ;

Kerekes, G ;

Erdelyi, Z .

VACUUM, 1998, 50 (3-4) :373-383

[3]

BEKE DL, 1998, P MRS SPRING M SAN F, V99, P528

[4]

BEKE DL, 2000, IN PRESS DIMAT

[5] Interdiffusion in amorphous Si/Ge multilayers by Auger depth profiling technique [J].

Csik, A ;

Langer, GA ;

Beke, DL ;

Erdélyi, Z ;

Menyhard, M ;

Sulyok, A .

JOURNAL OF APPLIED PHYSICS, 2001, 89 (01) :804-806

[6] Effect of low hydrostatic pressures on the solid state reactions in multilayers [J].

Daroczi, L ;

Beke, DL ;

Langer, G ;

Radnoczi, G ;

Czigany, Z .

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1996, 156 (1-3) :417-418

[7] Interdiffusion in epitaxial Co/Pt multilayers [J].

McIntyre, PC ;

Wu, DT ;

Nastasi, M .

JOURNAL OF APPLIED PHYSICS, 1997, 81 (02) :637-645

[8]

PHILIBERT J, 1991, ATOM MOVEMENTS DIFFU, P426

[9]

PIECUCH M, 1990, MATER SCI FORUM, V93, P59

[10] INTERDIFFUSION IN SI/GE AMORPHOUS MULTILAYER FILMS [J].

PROKES, SM ;

SPAEPEN, F .

APPLIED PHYSICS LETTERS, 1985, 47 (03) :234-236

← 1 2 →