Infrared multispectral detection using Si/SixGe1-x quantum well infrared photodetectors

被引：25
作者：
Krapf, D [1 ]
Adoram, B
Shappir, J
Sa'ar, A
Thomas, SG
Liu, JL
Wang, KL
机构：
[1] Hebrew Univ Jerusalem, Fredi & Nadine Herrmann Sch Appl Sci, Dept Appl Phys, IL-91904 Jerusalem, Israel
[2] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90095 USA
来源：
APPLIED PHYSICS LETTERS | 2001年 / 78卷 / 04期
关键词：
D O I：
10.1063/1.1343498
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A modified p-type Si/SiGe quantum well infrared photodetector for multispectral infrared imaging applications is demonstrated. In order to improve the detector's performances we have used a SiGe emitter and a low-temperature wet passivation process that give rise to a reduced dark current, even at relatively high bias voltages. Multispectral photoresponse at the long, mid and short wavelength infrared atmospheric windows was observed. The response peaks are assigned to the various classes of intervalence band transitions in the quantum wells and in the SiGe emitter layers. (C) 2001 American Institute of Physics.
引用
收藏
页码：495 / 497
页数：3
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