Multi-polymer microstereolithography for hybrid opto-MEMS

被引：22

作者：

Maruo, S ^{[1
]}

Ikuta, K ^{[1
]}

Ninagawa, T ^{[1
]}

机构：

[1] Nagoya Univ, Grad Sch Engn, Dept Micro Syst Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan

来源：

14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2001年

关键词：

D O I：

10.1109/MEMSYS.2001.906501

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed a novel microstereolithography method for producing a hybrid structure using multiple photocurable polymers. This method, termed the Multi-polymer IH process, has the potential to provide us with various functional microdevices, such as actuators, sensors and optical devices. The microdevices are produced by combining the diverse properties of different photocurable polymers. To verify the basic performance of our process, several optical waveguides were made with two kinds of photocurable polymers having different refractive indexes. By combining the optical, electrical and mechanical properties of photocurable polymers, this process should advance Polymer MEMS technology and make a substantial contribution to microoptics and microchemical devices for BioMEMS.

引用

页码：151 / 154

页数：4

共 11 条

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