ELECTRON-STIMULATED OXYGEN ADSORPTION ON THE SURFACE OF METALS AND SEMICONDUCTORS

被引:0
作者
Ashkhotov, O. G. [1 ]
Ashkhotova, I. B. [1 ]
Aleroev, M. A. [1 ]
Krimshokalova, D. A. [1 ]
机构
[1] Kabardino Balkarian State Univ, Dept Elect & Informat Technol, Inst Informat Elect & Comp Technol, Nalchik, Russia
关键词
spectroscopy; surface; electrons; radiation; dissociation; migration; adsorption; desorption; experiments; exposure; BEAM; OXIDATION; AUGER; SI; CO;
D O I
10.26456/pcascnn/2019.11.026
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The phenomenon of electron-stimulated adsorption occurs in almost all devices where electron emission is used. Electron-stimulated adsorption can have a significant effect on the state of the adsorbed layer. This review presents typical results obtained in the study of electronically stimulated processes of the oxygen adsorption from a gas phase and the main patterns of changes in the surface structure caused by electron-stimulated adsorption.
引用
收藏
页码:26 / 39
页数:14
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