Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure

被引:116
作者
Marris-Morini, Delphine [1 ]
Vivien, Laurent [1 ]
Fedeli, Jean Marc [2 ]
Cassan, Eric [1 ]
Lyan, Philippe [2 ]
Laval, Suzanne [1 ]
机构
[1] Univ Paris 11, Inst Elect Fondamentale, F-91405 Orsay, France
[2] Minatec, CEA LETI, F-38054 Grenoble, France
关键词
D O I
10.1364/OE.16.000334
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A high speed and low loss silicon optical modulator based on carrier depletion has been made using an original structure consisting of a p-doped slit embedded in the intrinsic region of a lateral pin diode. This design allows a good overlap between the optical mode and carrier density variations. Insertion loss of 5 dB has been measured with a contrast ratio of 14 dB for a 3 dB bandwidth of 10 GHz. (c) 2007 Optical Society of America.
引用
收藏
页码:334 / 339
页数:6
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